JPH0249128U - - Google Patents
Info
- Publication number
- JPH0249128U JPH0249128U JP12774988U JP12774988U JPH0249128U JP H0249128 U JPH0249128 U JP H0249128U JP 12774988 U JP12774988 U JP 12774988U JP 12774988 U JP12774988 U JP 12774988U JP H0249128 U JPH0249128 U JP H0249128U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- piping
- cvd apparatus
- checked
- outer peripheral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000002093 peripheral effect Effects 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12774988U JPH0249128U (en]) | 1988-09-29 | 1988-09-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12774988U JPH0249128U (en]) | 1988-09-29 | 1988-09-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0249128U true JPH0249128U (en]) | 1990-04-05 |
Family
ID=31380457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12774988U Pending JPH0249128U (en]) | 1988-09-29 | 1988-09-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0249128U (en]) |
-
1988
- 1988-09-29 JP JP12774988U patent/JPH0249128U/ja active Pending